Unjiniyela

Ithebula lepharamitha

Incazelo Yomkhiqizo

Kusekhethi edidiyelwe kanye nokukhiqizwa kwephaneli yokubonisa, "ukuthuthukiswa" ngokuvamile kubhekisela esinyathelweni senqubo ye-photolithography esetshenziselwa ukususa i-photoresist ezindaweni ezingadalulwanga. Lesi sinyathelo sibalulekile enqubweni yokukhiqiza ngoba sichaza iphethini nesakhiwo sezinto ezibonakalayo, ezithinta ukusebenza komsebenzi wedivayisi. Enqubweni ye-photolithography, isixazululo esikhulayo sisetshenziselwa ukucubungula i-photoresist emboza indawo ye-chip futhi isuse i-photoresist ezindaweni ezingaveziwe.

Ukusetshenziswa okuqondile ngokuvamile kufaka izinyathelo ezilandelayo:
Ukulungiselela:Ngaphambi kokuthuthukisa, udinga ukulungisa amathuluzi asathuthuka futhi uthuthukise isisombululo. Isixazululo esikhulayo ngokuvamile siyisisombululo samakhemikhali esikhethekile esincibilikisa i-photoresist ezindaweni ezingavezwanga.
Ukucwiliswa emanzini:I-chip embozwe nge-photoresist icwiliswe kusixazululo esikhulayo. Isikhathi sokucwiliswa kanye nezinga lokushisa ngokuvamile kudingeka kulawulwe ukuze kuqinisekiswe ukuthi i-photoresist isuswe kahle.
Ukugeza:Ngemuva kokuthi ukuthuthukiswa sekuqediwe, i-chip ngokuvamile idinga ukugezwa ukuze kukhishwe izinsalela zesixazululo ezikhulayo nokunye ukungcola.
Ukomisa:Okokugcina, i-chip idinga ukumiswa ukuze kuqinisekiswe ukuthi indawo yayo yomile futhi ayinazinsalela.

Ekwenziweni kwephaneli yesibonisi, izinyathelo zokuthuthukisa ezifanayo zingasetshenziswa futhi ukususa izinto ezithile noma izinhlanganisela ukuze kwakhe amaphethini athile noma izakhiwo zephaneli yokubonisa. Kuyaphawuleka ukuthi inqubo yokuthuthukiswa idinga ukulawula okuqinile kwemingcele yokucubungula kanye nesikhathi sokuqinisekisa ukuthi amaphethini nezakhiwo eziwumphumela zihlangabezana nezidingo zokuklama kanye nokunemba kokukhiqiza. Ngaphezu kwalokho, kunoma iyiphi inqubo yokukhiqiza, ukusetshenziswa kwezinto zamakhemikhali kudinga ukuhambisana nezinqubo ezihambisanayo zokusebenza eziphephile kanye nezidingo zokuvikela imvelo.

Abathuthukisi basetshenziswa kakhulu kwinqubo ye-photolithography embonini ye-semiconductor. Inqubo ye-photolithography iyisinyathelo esibalulekile ekwenziweni kwe-semiconductor, esetshenziselwa ukuchaza amaphethini amancane nezakhiwo kumawafa e-silicon ku-chip. Enqubweni ye-photolithography, i-photoresist imbozwa phezu kwe-silicon wafer, bese iphethini idluliselwa ku-photoresist ngokusebenzisa imaski nokuchayeka ekukhanyeni kwe-UV. Bese, umthuthukisi ufika esiteji. Umsebenzi wonjiniyela ukuhlakaza noma ukususa ingxenye ye-photoresist engazange yenziwe i-photolithographed, ngaleyo ndlela idlulisele iphethini efunekayo kusiluli se-silicon. Lesi sinyathelo sibeka isisekelo sokunamathisela okulandelayo, ukufakwa kanye nezinye izinqubo, ukuqinisekisa ukuthi i-microstructure edingekayo ku-chip ingakopishwa ngokunembile ku-wafer ye-silicon. Ukukhethwa nokusetshenziswa konjiniyela kunomthelela obalulekile kukhwalithi nokusebenza kwe-chip yokugcina, ngakho-ke ukusetshenziswa komthuthukisi kudinga ukulawulwa ngokuqinile futhi kufane ekukhiqizeni imboni ye-semiconductor.